Nikon’s new LCD steppers FX-803M & FX-903N

Nikon Corporation has recently announced its two LCD steppers, FX-803M & FX-903N, will be brought out in markets during April, 2007. Nikon’s flat panel display exposure systems are optimal for producing high-definition, mid-to-small size liquid crystal displays (LCDs) meeting the demands of cellular phones and in-vehicle applications.

FX-803M & FX-903N steppers are large plate applications supporting plate size of 730mm x 920mm. It infers that now it is possible to produce 294 panels of Type 2 or 84 panels of Type 4 LCDs from one plate. New models have adopted a newly developed large diameter, low aberration i-line projection lens enabling a high resolution of 1.5μm (3μm for FX-803M).

Product Highlights:
• Alignment accuracy 0.38μm or better (3σ) 0.30μm or better (3σ)
• Exposure field 132 x 132mm 132 x 132mm
• Exposure wavelength g+h-line i-line (365nm)
• Maximum plate size 730 x 920 mm 730 x 920 mm
• Projection magnification 1: 1.25 1: 1.25
• Resolution (L/S) 3.0μm 1.5μm
• Reticle size 6-in (0.25-in thickness) 6-in (0.25-in thickness)
• Tact time (30 shots) 61 seconds (40mJ/cm2) 61 seconds (50mJ/cm2)

Via:Nikon